🔍
Method of depositing nanotwinned nickel-molybdenum-tungsten alloys
Case ID:
C14429
Report of Invention:
11/4/2016
Web Published:
3/6/2025
Unmet Need
Metal MEMS devices would be very useful in extreme environments and especially at elevated temperatures, where potential future applications include: micro power generation, high frequency switches and sensors, and digital monitoring and control of residential and commercial components in what is often referred to as the “Internet of Things”. Such devices are not yet available, because these applications demand the development of advanced materials with greater strength, density, electrical and thermal conductivity, dimensional stability, and microscale manufacturability.
Technology Overview
The present invention is directed to the synthesis of metallic nickel-molybdenum-tungsten films with direct current sputter deposition. These films exhibit linear-elastic mechanical behavior and tensile strengths exceeding 3 GPa, which is unprecedented for materials that are compatible with wafer-level device fabrication processes. These films also possess exceptional thermal and mechanical stability, high density, and electrical properties that are attractive for next generation metal MEMS applications.
Stage of Development
Next stage is to manufacture simple MEMS devices e.g. micro-cantilevers, with appropriate dimensional control and reliability, based on the newly developed metallic alloy.
Publication(s)
Patent Information:
Title
App Type
Country
Serial No.
Patent No.
File Date
Issued Date
Expire Date
Patent Status
METHOD OF DEPOSITING NANOTWINNED NICKEL-MOLYBDENUM-TUNGSTEN ALLOYS
PCT: Patent Cooperation Treaty
European Patent Office
18794547.2
5/1/2018
Pending
METHOD OF DEPOSITING NANOTWINNED NICKEL-MOLYBDENUM-TUNGSTEN ALLOYS
PCT: Patent Cooperation Treaty
Japan
2019-560364
5/1/2018
Pending
METHOD OF DEPOSITING NANOTWINNED NICKEL-MOLYBDENUM-TUNGSTEN ALLOYS
PCT: Patent Cooperation Treaty
Korea (South)
10-2019-7035308
10-2630654
5/1/2018
1/24/2024
5/1/2038
Granted
METHOD OF DEPOSITING NANOTWINNED NICKEL-MOLYBDENUM-TUNGSTEN ALLOYS
DIV: Divisional
Japan
2023-100503
5/1/2018
Pending
METHOD OF DEPOSITING NANOTWINNED NICKEL-MOLYBDENUM-TUNGSTEN ALLOYS
PCT: Patent Cooperation Treaty
United States
16/609,968
11,851,320
10/31/2019
12/26/2023
10/11/2040
Granted
Direct Link:
https://jhu.technologypublisher.com/technology/56451
Inventors:
Category(s):
Technology Classifications > Industrial Tech > Industrial Manufacturing, Technology Classifications > Industrial Tech > Materials, Technology Classifications > Industrial Tech, Technology Classifications > Engineering Tech > Industrial Manufacturing, Technology Classifications > Engineering Tech > Materials,
Get custom alerts for techs in these categories/from these inventors:
Subscribe for JHTV Updates
For Information, Contact:
Lisa Schwier
lschwie2@jhu.edu
410-614-0300
Save This Technology:
Bookmark this page
Download as PDF
JHTV Home
|
Search
|
Login/Subscribe
2017 - 2022 © Johns Hopkins Technology Ventures. All Rights Reserved. Powered by
Inteum